plasmaCVD相关论文
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The urgent need for massively scalable carbon-free energy sources has focused attention on both increasing the efficienc......
Effects of Flux of Carbon Radicals on Anisotropic Deposition of Carbon Films on Fine Trench Using H-
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Dielectric barrier discharge (DBD) was widely used for generating atmospheric pressure,non-thermal plasmas and recently ......
介绍了等离子化学气相沉积氮化钛技术在高速钢刀具和飞机用高速钢精密轴承上的应用，经ＰＣＶＤ－ＴｉＮ处理的高速钢刀具可以提高其表面强度，降低摩擦......
研究了反应气体对辅助加热ＰＣＶＤ－ＴｉＮ薄膜制备的影响。结果表明，提高反应气体中ＴｉＣｌ４薄膜内的氯含本不变。......
研究了反应气体对辅助加热ＰＣＶＤ－ＴｉＮ薄膜制备的影响，结果表明，提高反应气体中ＴｉＣｌ４的含量可以提高薄膜的沉积速率，而且对薄膜内的氯含量没有影响。提......
